Phosphorylfluoride (6CI,8CI); Phosphorus fluoride oxide (PF3O); Phosphorus fluoride oxide(POF3); Phosphorus oxyfluoride; Phosphorus oxyfluoride (POF3); Phosphorustrifluoride oxide; Phosphoryl trifluoride; Trifluorophosphine oxide;Trifluorophosphorus oxide
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